HEA|  |00560pam0 2200181   45  
001|  |0000053994
005|  |19990922161815
010|  |□d1.50元
100|  |□a19990922d1997    m  y0chiy0121    eb
101|0 |□achi
105|  |□ay       000yy
106|  |□a 
200|10|□a大规模和超大规模集成电路基础工艺技术□f保华生编著□Ad-
   |  |a gui mo he chao da gui mo ji -
   |  |cheng dian lu ji chu gong yi ji shu
210|  |□a北京□c电子工业出版社□d1985.5
215|  |□a208页□d20cm
690|  |□aTN47
701| 0|□a保华生□4编著□Abao hua sheng
905|  |□aST□fTN47/5□s3